13.5n 极紫外Schwarzschild物镜
EUV Schwarzschild镜-for 13.5nmMagnification: 21.34NA: 0.2Focal length: 26.95 mmDiffraction limited!λ= 13.5: 40 nmMechanical holder:Material: InvarOverall weight: 4.9 kg Pinhole array test s
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EUV Schwarzschild镜-for 13.5nm
| Magnification: 21.34 NA: 0.2 Focal length: 26.95 mm Diffraction limited! λ= 13.5: 40 nm |  |
| Mechanical holder: Material: Invar Overall weight: 4.9 kg |
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Pinhole array test structures in AR-P610, Resolution < 100 nm