微纳X射线分辨率测试卡

X射线分辨率测试卡是测量成像系统成像质量的重要工具，我司可提供各种类型的测试卡以满足您的各种需求。图案类型包括线对、孔阵列和西门子星等。

1. Nanostructured Resolution X-ray samples

1.1 Nanostructured Resolution X-ray samples (50 nm) made from Au on a

Substrate:

6 mm x 6 mm x 0.25 mm

silicon chip with

2 mm x 2 mm x 250 nm Si₃N₄ window

Geometries include:

nested L-shape structures

Siemens star test patterns

The parameters are as follows:

Gold height > 800 nm

Smallest Feature size of Au ca. 50 nm

1.2 Nanostructured High Resolution X-ray samples (10 nm - 30 nm) made from SiO₂ and Ir and Au on a

Substrate:

6 mm x 6 mm x 0.25 mm

silicon chip with

2 mm x 2 mm x 250 nm Si₃N₄ window

Geometries include:

nested L-shape structures

Siemens star test patterns

The parameters are as follows:

1.2.1 Hybrid High Resolution X-ray Sample (30 nm)

Smallest Feature size of Ir 30 nm

Material height: >400 nm

Gold height > 500 nm

Smallest Feature size of Au ca. 50 nm

1.2.2 Hybrid Super-High Resolution X-ray Sample (20 nm)

Smallest Feature size of Ir 20 nm

Material height: >200 nm

Gold height > 500 nm

Smallest Feature size of Au ca. 50 nm

1.2.3 Hybrid Ultra-High Resolution X-ray Sample (10 nm)

Smallest Feature size of Ir 10 nm

Material height: >100 nm

Gold height > 500 nm

Smallest Feature size of Au ca. 50 nm

MOUNTING (optional)

XRnanotech will mount chip on holder provided by customer

OR

XRnanotech will mount chip on XRnanotech standard holder.

2. MicroCT Test Target

2.1 MicroCT Test Target(400nm)

Substrate:

9 mm x 9 mm x 0.25 mm

silicon chip with

3 mm x 3 mm x 250 nm Si₃N₄ window

Geometry:

nested L-shape structures

Siemens-star

The parameters are as follows:

Gold height ~4000 nm

Smallest Feature size of Au ca. 200 nm

2.2 MicroCT Test Target(300nm)

Substrate:

9 mm x 9 mm x 0.25 mm

silicon chip with

3 mm x 3 mm x 250 nm Si₃N₄ window

Geometry:

nested L-shape structures

Siemens-star

The parameters are as follows:

Gold height ~4000 nm

Smallest Feature size of Au ca. 300 nm

2.3 MicroCT Test Target(200nm)

Substrate:

9 mm x 9 mm x 0.25 mm

silicon chip with

3 mm x 3 mm x 250 nm Si₃N₄ window

Geometry:

nested L-shape structures

optionally: Siemens-star

The parameters are as follows:

Gold height ~1500 nm

Smallest Feature size of Au ca. 200 nm

2.4 MicroCT Test Target(100nm)

Substrate:

9 mm x 9 mm x 0.25 mm

silicon chip with

3 mm x 3 mm x 250 nm Si₃N₄ window

Geometry:

nested L-shape structures

Siemens-star

The parameters are as follows:

Gold height >1000 nm

Smallest Feature size of Au ca. 100 nm

Will be delivered mounted on XRnanotech-holder by default.