XUV/极紫外透射光栅

XUV/极紫外透射光栅

定制透射光栅,可用于光谱仪,光束轮廓监测和分束。 Ta/SiN双涂层或SiN单涂层自支撑光栅,具有侧壁粗糙度低,清晰度高等特点,非常适用于XUV衍射实验

描述:

- 薄膜上的衍射光栅或自支撑透射光栅

-  1维光栅

Ø  线

-        2维光栅

Ø  正方形/棋盘格

Ø  圆孔

Ø  以六边形排列的圆

-        用于光谱学、极紫外光刻及其他应用

-        多用材料可选(Cr, Si, Au, Ni, SiO2, Ir, Diamond))

 

规格和参数

参数

典型值

光栅区域

Typical 1 x 1 mm, 2 x 2 mm, up to 3 x 3 mm possible

典型光栅周期

100 nm – 10.000 nm

材料

e.g. Cr/Au/SiO2 on 100 nm Si3N4,自支撑结构请咨询

典型的支持框尺寸

3 x 3 mm or 6 x 6 mm


用于X射线自由电子激光和高功率激光的金刚石加工案例:

北京众星联恒科技有限公司


发表文章: 

S. Marathe et al. Development of synchrotron pink beam x-ray grating interferometer at the Diamond Light source I13-2 beamline Developments in X-Ray Tomography XII 11113 (2019) p. 1111319


C. David et al. Differential phase-contrast imaging using a grating interferometer Applied Physics Letters 81 (2002) p. 3287


F. Pfeiffer et al. Phase retrieval and differential phase-contrast imaging with low-brilliance X-ray sources Nature Physics 2 (2006) p. 258


I. Zanette et al. Two-Dimensional X-ray Grating Interferometer Physical Review Letters 105 (2010) p. 248102


Y. Kayser et al. Wavefront metrology measurements at SACLA by means of x-ray grating interferometry Optics Express 22 (2014) p. 9004


S. Rutishauser et al. Exploring the wavefront of hard x-ray free electron laser radiation Nature Communications 3 (2012), p. 947


规格和参数


参数

典型值

光栅区域

Typical 1 x 1 mm, 2 x 2 mm, up to 3 x 3 mm possible

典型光栅周期

100 nm – 10.000 nm

材料

e.g. Cr/Au/SiO2 on 100 nm Si3N4,自支撑结构请咨询

典型的支持框尺寸

3 x 3 mm or 6 x 6 mm


-        用于光谱学、

-    极紫外光刻、极紫外干涉光刻

-    光束轮廓检测

-    分束等

-    同步辐射及自由电子激光波前检测






发表文章: 

S. Marathe et al. Development of synchrotron pink beam x-ray grating interferometer at the Diamond Light source I13-2 beamline Developments in X-Ray Tomography XII 11113 (2019) p. 1111319


C. David et al. Differential phase-contrast imaging using a grating interferometer Applied Physics Letters 81 (2002) p. 3287


F. Pfeiffer et al. Phase retrieval and differential phase-contrast imaging with low-brilliance X-ray sources Nature Physics 2 (2006) p. 258


I. Zanette et al. Two-Dimensional X-ray Grating Interferometer Physical Review Letters 105 (2010) p. 248102


Y. Kayser et al. Wavefront metrology measurements at SACLA by means of x-ray grating interferometry Optics Express 22 (2014) p. 9004


S. Rutishauser et al. Exploring the wavefront of hard x-ray free electron laser radiation Nature Communications 3 (2012), p. 947



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