XUV多层反射镜（EUV多层反射镜）
基板形状：平面、凸形、凹形、抛物面、超环面、椭圆面
基板材料：石英、硅、zero dewer等
多层膜材料：Mo/Si（50eV至100eV）、Ru/Si（50eV至100eV）、Zr/Al（50eV至70eV）、SiC/Mg（25eV至50eV）、Cr/C（至300eV）等
基板尺寸：φ3毫米至φ300毫米（标准值为1英寸）
产品示例
Mo/Si多层反射镜具有接近13纳米（90电子伏）波长的高反射率。NTT-AT公司的Mo/Si多层反射镜具有高达70％的正入射反射率。
NTT-AT公司的XUV反射镜的材料、膜结构和基板形状可以定制以满足用户有关中心波长和光学装置的需求。
Φ10毫米平面反射镜 |
测量的Mo/Si多层的反射率 （正入射角：2度） |
用于泵浦探测试验的多层反射镜 |
测量宽带反射镜、 |
EUV宽带椭圆面反射镜 | |
No | Design name | AOI | pol. | peak energy | reflectivit | bandwidth (FWHM) | ||
1 | HR-98-3.4 | 5 deg | s | 98 eV | 12.7 nm | 67.7% | 3.4 eV | (0.4 nm) |
2 | HR-95-3.8 | 5 deg | s | 95 eV | 13.1 nm | 67.7% | 3.8 eV | (0.5 nm) |
3 | HR-90-3.8 | 5 deg | s | 90 eV | 13.8 nm | 68.0% | 3.8 eV | (0.6 nm) |
4 | HR-85-4.0 | 5 deg | s | 85 eV | 14.6 nm | 66.8% | 4.0 eV | (0.7 nm) |
5 | HR-80-4.0 | 5 deg | s | 80 eV | 15.5 nm | 63.3% | 4.0 eV | (0.8 nm) |
6 | HR-75-4.6 | 5 deg | s | 75 eV | 16.5 nm | 54.5% | 4.6 eV | (1.0 nm) |
7 | HR-70-5.0 | 5 deg | s | 70 eV | 17.7 nm | 47.5% | 5 eV | (1.2 nm) |
8 | HR-70-2.6 | 5 deg | s | 70 eV | 17.7 nm | 52.1% | 2.6 eV | (0.7 nm) |
9 | HR-65-2.6 | 5 deg | s | 65 eV | 19.1 nm | 48.5% | 2.6 eV | (0.8 nm) |
10 | HR-60-2.8 | 5 deg | s | 60 eV | 20.7 nm | 43.7% | 2.8 eV | (1.0 nm) |
11 | HR-55-3.6 | 5 deg | s | 55 eV | 22.5 nm | 37.3% | 3.6 eV | (1.5 nm) |
12 | HR-50-4.2 | 5 deg | s | 50 eV | 24.8 nm | 30.9% | 4.2 eV | (2.1 nm) |
13 | HR-48-2.0 | 5 deg | s | 48 eV | 25.8 nm | 50.6% | 2.0 eV | (1.1 nm) |
14 | HR-45-2.4 | 5 deg | s | 45 eV | 27.6 nm | 48.4% | 2.4 eV | (1.4 nm) |
15 | HR-40-2.6 | 5 deg | s | 40 eV | 31.0 nm | 44.8% | 2.6 eV | (2.0 nm) |
16 | HR-35-2.6 | 5 deg | s | 35 eV | 35.4 nm | 43.1% | 2.6 eV | (2.6 nm) |
17 | HR-30-3.0 | 5 deg | s | 30 eV | 41.3 nm | 41.2% | 3.0 eV | (4.1 nm) |
18 | HR45-90-6.0 | 45 deg | s | 90 eV | 13.1 nm | 66.1% | 6.0 eV | (0.9 nm) |
19 | HR45-80-7.4 | 45 deg | s | 80 eV | 15.5 nm | 60.0% | 7.4 eV | (1.4 nm) |
20 | HR45-70-36.0 | 45 deg | s | 70 eV | 17.7 nm | 49.0% | 3.6 eV | (0.9 nm) |
21 | HR45-60-5.4 | 45 deg | s | 60 eV | 20.7 nm | 40.8% | 5.4 eV | (1.8 nm) |
22 | HR45-50-10.0 | 45 deg | s | 50 eV | 24.8 nm | 30.0% | 10.0 eV | (5.1 nm) |
23 | HR45-40-5.0 | 45 deg | s | 40 eV | 31.0 nm | 44.4% | 5.0 eV | (3.8 nm) |
24 | HR45-30-7.0 | 45 deg | s | 30 eV | 41.3 nm | 42.5% | 7.0 eV | (9.3 nm) |
天文学
XUV光电子光谱
XUV显微
EUV光刻
等离子体物理
阿秒科学
NTT-XUV高反射率镜 datasheet 2022.4.24.pdf
Multilayer Coating for Extreme Ultraviolet Experiments - white paper 20201202