EUV Replicated Optics

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EUV Replicated Optics
EUV Replicated Optics
EUV Replicated Optics

EUV Replicated Optics

OverviewIn 2008, Rigaku Innovative Technologies Europe s.r.o. (RITE) became part of the Rigaku Corporation. Originally a research & development facility, RITE now implements cutting edge technolog

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In 2008, Rigaku Innovative Technologies Europe s.r.o. (RITE) became part of the Rigaku Corporation. Originally a research & development facility, RITE now implements cutting edge technologies in the ray tracing, design, manufacturing and testing of “super smooth“ X-ray optics for EUV, XUV and X-ray radiation. The technological combination of extremely smooth optical surfaces and system building techniques allows for metal replication technologies such as Au, Ni, Rh and many more.

RITE also manufactures rotationally symmetric, aspheric X-ray optics for standard and custom designs which can be rapidly developed and manufactured in any quality, for virtually any application, in EUV, XUV and X-ray radiation.

  • FOM Netherlands

  • Philips, Netherlands

  • Bede Ltd., UK

  • Stratchclyde University, UK

  • CYMER, USA

  • Laser Laboratorium Gottingen, Germany

  • Naval Research Labs, USA

  • NIST, USA

  • University of California, USA

  • NTT Research Labs, Japan

  • NSTR, Japan

  • Toyota Research Labs, Japan

  • LG, Korea

  • TNO, Netherlands

  • BESSY, Germany

  • UCD, Ireland


Total Reflection Optics


RITE manufactures and sells Total Reflection X-ray optics.  Total Reflection X-ray Optics are specially designed to satisfy both the evolving EUV/XUV industry and the more established Hard and Soft X-ray applications.

RITE has mastered a unique manufacturing technology called replication. This manufacturing technique enables the production of X-ray optics with unique optical features such as low weight, high surface precision (low slope error) and extremely low micro-roughness. Another interesting attribute of Total Reflection Optics is the use of various metallic layers as coatings. The most commonly used materials are Ni, Au, Mo and Ru.


       

 

Ellipsoidal mirror, Ni active surface, L=100 mm


           

Ellipsoidal mirror, Au active surface, L=100 mm

  Ellipsoidal mirror, Au active surface, L=80 mm

         

  Ellipsoidal mirror, Ni active surface, L=100 mm

         

Wolter type mirror, Au active surface, L=100 mm

Size overview of replicated mirrors


Technical Specification of Replicated Optics

  • Optical surface material: Au, Ni, Rh, Mo, etc…

  • Most advanced replication technology

    • Spectral range: EUV (60 – 200 eV)

    • Soft X-ray (200 – 2000 eV)

    • Hard X-ray (2000 – 10000 eV)

  • Optical shape: elliptical, parabolic and other aspherical shapes available upon request

  • Typical surface roughness: Ra ≈ 0.3 – 2 nm

  • Typical dimensions: Diameter (D): 5 – 250 mm

    • Length (L): 10 – 130 mm

Geometry of an ellipsoidal mirror

Geometry of an parabolic mirror

     
Performance Examples of Replicated Optics

Higher Performance Through Better Coating Layers

       
        Au vs. Ru, up to 2x higher reflectivity using ruthenium layer



Multi Foil Optics (MFO)


Extending the replicated optics technologies, RITE designs and produces Multi Foil Optics (MFO). These specialty optics are perfectly suited for applications where low energies and a very wide field of view is needed.




Multifoil Optics utilizing various types of metallic foils as coatings