CCD & sCMOS DetectorsOverviewIn 2008, Rigaku Innovative Technologies Europe s.r.o. (RITE) became part of the Rigaku Corporation. RITE’s primary focus has been research & development projects
In 2008, Rigaku Innovative Technologies Europe s.r.o. (RITE) became part of the Rigaku Corporation. RITE’s primary focus has been research & development projects which have resulted in an extension of Rigaku’s X-ray optics and detectors for EUV/XUV, Hard and Soft X-rays.
RITE has developed and manufactures CCD and sCMOS X-ray imaging detectors both of which contain the highest spatial resolution commercially available. They are called the XSight™ LC and XSight™ FC detectors.
BESSY Synchrotron (Germany)
BliX Institute (Germany)
CEITEC MU (Czech Republic)
Gottingen University (Germany)
X-ray Micron and Submicron Microscopy
X-ray Tomography
X-ray Metrology
X-ray Imaging
Up to five different lens units can be used with Rigaku XSight™ Micron LC Camera Body. Thanks to bayonet type mounts, all lens units can be easily and quickly changed. Their housing prevents any scattered X-rays from hitting a CCD or sCMOS sensor directly and thus raising noise.
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XSight LC Lens Unit
| Technical features | ||
| Field of view | Model LC 0270 | 0.90 mm (H) x 0.68 mm (V) |
| Model LC 0540 | 1.80 mm (H) x 1.35 mm (V) | |
| Model LC 1080 | 3.60 mm (H) x 2.70 mm (V) | |
| Model LC 2160 | 7.20 mm (H) x 5.40 mm (V) | |
| Model LC 4320 | 14.40 mm (H) x 10.80 mm (V) | |
| Effective pixel size | Model LC 0270 | 0.27 µm |
| Model LC 0540 | 0.54 µm | |
| Model LC 1080 | 1.08 µm | |
| Model LC 2160 | 2.16 µm | |
| Model LC 4320 | 4.32 µm | |
| Max. resolvable pattern via JIMA RT RC-02 (center area, 8 keV) | Model LC 0270 | 0.4 µm |
| Model LC 0540 | 0.6 µm | |
| Model LC 1080 | 1.5 µm | |
| Model LC 2160 | 3.0 µm | |
| Model LC 4320 | 7.0 µm | |
| Spectral range | 5 keV – 30 keV | |
| Dimension | 68.8 mm (v) x 78.0 mm (dia.) | |
| Weight | 1.3 kg (LC 0270 to LC 2160) 1.5 kg (LC 4320) | |
| Environmental conditions | ||
| Maximal operational ambient temperature | TBD | |
| Relative humidity, non condensing | 10% to 90% | |
| Technical features | |
| Field of view | Selectable: from 0.90 mm (H) x 0.68 mm (V) to 14.40 mm (H) x 10.80 mm (V) |
| Effective pixel size | According to selected field of view: From 0.27 µm to 4.32 µm |
| Number of pixels | 3300 x 2500 |
| Spectral range | 3 keV – 30 keV |
| Dynamic range | 3100 : 1 (70dB) |
| Acquisition gain | 0.45 e-/ADU |
| Readout noise | 10 e- rms |
| Readout rate | approx. 1 frame per sec |
| Dark current | 0.02 e-/pix./s |
| Binning | independent binning in x, y |
| Remote triggering | input / output trigger |
| Data interface | USB2.0 |
| Sensor type | CCD |
| Technical features | ||
| Array size | 2048(H) x 2048(V) | |
| Pixel size | 6.5 um | |
| Sensor diagonal | 18.8 mm | |
| Nonlinearity | 0.2% | |
| Dynamic range | 21 400 : 1 | |
| Acquisition gain | 0.55 e-/ADU | |
| Readout noise | 1.4 e- rms | |
| Readout rate | 40 fps (@ 16 bit) | |
| Dark current | 0.14 e-/pix./s 0ºC (air-cooled) 0.04 e-/pix./s -10ºC (water-cooled) | |
| Binning | 2 x 2, 3 x 3, 4 x 4, 8 x 8 | |
| Peak quantum efficiency | 0.82 | |
| Remote triggering | input / output trigger | |
| Shutter type | Rolling shutter | |
| Data interface | USB 3.0 | |
| Sensor Type | sCMOS | |
Photo of a tick |
0.4 micron resolution |
The XSight™ µRapid (sCMOS version) is a compact and fast two dimensional (2D) X-ray Camera composed of thin phosphor screen, fiber optics and a camera. The XSight™ FC camera is a fiber optics coupled camera that is approximately 20x more sensitive when compared to the XSight™ LC version. The XSight™ FC has a spatial resolution of 8 μm and 16 microns. The XSight™ FC camera is also available in a CCD version.
XSight-TM; µRapid Camera
X-ray Microscopy
X-ray Topography
X-ray Optics Adjustment & Metrology
X-ray Imaging
| Technical features | |
| Fiber optics | 1 : 1 (other magnification / demagnification ratios on request) |
| Field of view | 13.3 mm (H) x 13.3 mm (V) |
| Effective pixel size | 6.5 µm |
| Spatial resolution (FWHM) | < 20 µm (@ 8 keV) |
| Spectral range | 5 keV – 30 keV |
| Dynamic range | 20000 : 1 (fast scan) 21430 : 1 (slow scan) |
| Readout noise | 1.5 (e- rms, fast scan) 1.4 (e- rms, slow scan) |
| Frame rate | 100 (fps @ full resolution, fast scan) 35 (fps @ full resolution, slow scan) |
| Cooling temperature | +5°C stabilized, with forced air or water cooling (up to 30°C ambient) |
| Dark current | < 0.5 e-/pix./s |
| Binning | 1 x 1, 2 x 2, 4 x 4 |
| Remote triggering | yes |
| Data interface | Camera Link Full (10 taps, 85 MHz) |
The Rigaku XSight™ Micron FC is an ideal compact two dimensional (2D) X-ray CCD camera optimized for use in applications as diverse as X-ray microscopy, X-ray topography, X-ray optics adjustment and metrology. The XSight™ Micron FC camera is composed of a thin phosphor screen, fiber optics and a CCD camera. The CCD camera itself contains a full frame CCD image sensor with 3326 (H) x 2504 (V) pixels.
XSight-TM Micron FC5400
| XSight-TM Micron FC2160
|
X-ray Microscopy
X-ray Topography
X-ray Optics Adjustment & Metrology
X-ray Imaging
The XSight™ Micron FC camera has a robust body preventing any scattered X-rays from hitting the CCD sensor directly and thus raising noise. The camera can be easily mounted to any custom holder via two M6 threads on the bottom of the camera body.
| Technical features | ||
| Nominal Field of view | Model FC 5400 | 18.0 mm (H) x 13.5 mm (V) |
| Model FC 2160 | 7.2 mm (H) x 5.4 mm (V) | |
| Nominal effective pixel size | Model FC 5400 | 5.40 µm |
| Model FC 2160 | 2.16 µm | |
| Typical spatial resolution (FWHM) | Model FC 5400 | 16 µm (@ 8 keV) |
| Model FC 2160 | 8 µm (@ 8 keV) | |
| Spectral range | 5 keV – 30 keV | |
| Typical dynamic range | 3100 : 1 (70dB) | |
| Typical acquisition gain | 0.45 e-/ADU | |
| Typical readout noise | 10 e- rms | |
| Readout rate | 8 Mpix./s (approx. 1 frame per second) | |
| Typical dark current | 0.02 e-/pix./∙s @ -30°C | |
| Binning | independent binning in x, y | |
| Remote triggering | input / output trigger | |
| Data interface | USB 2.0 | |
