Two-Photon Polymerization
Leveraging cutting-edge equipment and extensive experience, we provide customers with one-stop solutions from design to finished products, covering core technologies such as electron beam lithography, laser direct writing, X-ray lithography, two-photon polymerization, EUV laser interference lithography, UV lithography, and electroplating. The product line includes Fresnel zone plates, nanoscale gratings, diamond optical components, nanoscale resolution test targets, and 3D resolution test targets. Fresnel zone plates can achieve resolutions as low as <10 nm, and with our unique Ir-line multiplication technology, X-ray beam focusing down to 5 nm can be achieved.
Two-photon grayscale lithography is a micro/nano fabrication technology based on nonlinear optical effects. Its principle involves using high-intensity femtosecond lasers to cause photosensitive molecules in the material to simultaneously absorb two low-energy photons (with total energy equal to that of single-photon absorption), thereby triggering polymerization. Since two-photon absorption occurs only in the high-energy-density region at the laser focus, complex shapes can be fabricated with high precision through layer-by-layer construction. This enables the manufacturing of precise three-dimensional structures.
Nanoscribe GT system
- Full 3D fabrication capability with minimum feature sizes below 200 nm.
- Supports multiple materials, including optional aluminum oxide coatings to enhance resolution and contrast.
- One-stop service from design to finished product
Nanoscribe Quantum X system
- Latest technology combining the superior performance of grayscale lithography with the precision and flexibility of two-photon polymerization (2PP).
- Maskless lithography system suitable for industrial fabrication of various 2.5D structures.
Typical applications
- Surface patterning, planar micro-optical components (including freeform lenses and microlens arrays).
- Multilevel diffractive optical elements.
Example microstructures
- High-aspect-ratio microlens array: 50 µm
- Fresnel lens: 100 µm
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