What is XRF


X-ray fluorescence (XRF) is a powerful quantitative and qualitative analytical tool for elemental analysis of materials. It is ideal for measuring thin film thickness and composition, determining elemental concentrations by weight in solids and solutions, and identifying specific and trace elements in complex sample matrices. XRF analysis is widely used in many industries, including semiconductors, telecommunications, microelectronics, metal processing and refining, food, pharmaceuticals, cosmetics, agriculture, plastics, rubber, textiles, fuels, chemicals, and environmental analysis. The method is fast, accurate, and non-destructive, requiring almost no sample preparation.


How XRF Works


When elements in a sample are exposed to a high-intensity X-ray source, fluorescent X-rays are emitted from the sample at energy levels characteristic of those elements.

The basic concept of all XRF spectrometers is the source, sample, and detection system. The source irradiates the sample, and the detector measures the fluorescent radiation emitted from the sample. In most cases, the source for XRF is an X-ray tube. Alternatives are radioactive sources or synchrotrons. There are two main types of XRF instruments: energy-dispersive X-ray fluorescence (EDXRF) and wavelength-dispersive X-ray fluorescence (WDXRF).

X-ray optical lenses can be used to enhance both types of XRF instruments. For conventional XRF instruments, typical focal spot sizes on the sample surface range from a few hundred micrometers to a few millimeters in diameter. Polycapillary focusing optics collect X-rays from a divergent X-ray source and direct them to form a small focused beam on the sample surface with diameters as small as tens of micrometers. The resulting increased intensity delivered to the sample in a small focal spot enhances spatial resolution for small-feature analysis and trace element measurement performance for micro-XRF applications. Doubly curved crystal optics direct high-intensity, micron-sized monochromatic X-ray beams to the sample surface for enhanced elemental analysis.