

Si3N4 membrane
Low-stress silicon nitride membranes optimized for X-ray, photonics, and nanoscale research.

Introduction
Our membrane products are available in both standard and custom configurations, with membrane thicknesses ranging from 50 nm to 2000 nm and support frame sizes from 3 mm to 20 mm, ensuring precise alignment with your project requirements. Whether you need off-the-shelf standard products or custom-designed membrane structures, our products deliver high performance and high reliability in advanced applications.
Description
- Low-stress silicon nitride membranes
- Ready-made standard and custom membranes
- Suitable for a wide range of applications, including MEMS, photonics, and nanoscale research
- Available in various sizes to meet specific project requirements
- Microfluidic devices
- Nanoscale coatings
- Various metal and polymer coatings


Specifications
Standard film specifications


About Top Unistar and XRnanotech
XRnanotechis a high-tech enterprise derived from more than a decade of frontier research and development at the Paul Scherrer Institut in Switzerland, officially established in 2020, dedicated to bringing breakthrough innovations in nanoscale optics to industrial application. Among them, Mciroworks GmbH in Germany is a subsidiary of XRnanotech, highly skilled in using LIGA technology to fabricate high-aspect-ratio micro- and nanostructures.
The company's vision is to empower optical instruments worldwide to fully realize their performance potential and break through existing technological boundaries; its mission focuses on developing and manufacturing nanoscale optical components of the highest level, achieving ultimate optimization in key metrics such as resolution, efficiency, stability, and structural design.
Its product line includes: extreme ultraviolet (EUV) and X-ray Fresnel zone plates, X-ray phase-contrast gratings, diamond optical components, X-ray micro/nano-resolution test targets, metalenses, and neutron gratings, with applications spanning frontier directions such as X-ray scientific research, materials analysis, and medical imaging. Leveraging its unique Ir-line multiplication technology,XRnanotech it can fabricate Fresnel zone plates with resolution as low as <10nm, and offers various materials such as gold, nickel, silicon (silicon dioxide), iridium, chromium, and even diamond.
TopUnistarAs the SwissXRnanotechcompany's exclusive agent in China, Top Unistar provides all pre-sales consultation, sales, and after-sales services to Chinese users. Meanwhile, as a leading service and solution provider in the EUV and X-ray field, Top Unistar has built up a certain scale ofinventory of EUV and X-ray related equipment and core components, enabling rapid delivery to better serve our users. In addition, we have established a well-equippedX-ray open laboratory, equipped with multiple advanced X-ray light source systems, optical components, and detectors, supporting a variety of testing, pre-research, and feasibility studies including X-ray imaging, phase-contrast imaging, diffraction analysis, fluorescence detection, and X-ray source performance characterization.
We are a team passionate about extreme ultraviolet (EUV) and X-ray technology. If you have any questions you would like to discuss or explore with us, please do not hesitate to contact us directly.

