XUV/EUV Transmission Grating

Custom transmission gratings for spectrometers, beam profile monitoring, and beam splitting.

Introduction

Description:

We can provide diffraction gratings on thin films or free-standing transmission gratings for spectroscopy, extreme ultraviolet (EUV) lithography, and other applications. A wide range of materials is available (Si3N4, Cr, Si, Au, Ni, SiO2, Ir, Diamond) with flexible selection.


Typical applications:

  • Spectroscopy
  • Extreme ultraviolet (EUV) lithography, EUV interference lithography
  • Beam profile detection
  • Beam splitting, etc.
  • Wavefront inspection for synchrotron radiation and free-electron lasers

Specifications

- 1D grating

  • lines

- 2D grating

  • square/checkerboard
  • circular holes
  • circles arranged in a hexagonal pattern

General Parameters

Parameter
Typical value
Grating area
Typical 1 x 1 mm, 2 x 2 mm, up to 3 x 3 mm possible
Typical grating period
100 nm – 10.000 nm
Material
e.g. Cr/Au/SiO2 on 100 nm Si3N4, self-supporting structures on request
Typical support frame size
3 x 3 mm or 6 x 6 mm

About Top Unistar and XRnanotech

XRnanotechA high-tech enterprise spun off from more than a decade of cutting-edge research and development at the Paul Scherrer Institut in Switzerland, formally established in 2020, dedicated to bringing breakthrough innovations in nanoscale optics to industrial application. Among its subsidiaries, Mciroworks GmbH in Germany excels in fabricating high-aspect-ratio micro- and nanostructures using LIGA technology.

The company's vision is to empower optical instruments worldwide to fully realize their performance potential and push beyond existing technological boundaries; its mission focuses on developing and manufacturing nanoscale optical components of the highest caliber, achieving极致 optimization in key metrics such as resolution, efficiency, stability, and structural design.

Its product line includes: extreme ultraviolet (EUV) and X-ray Fresnel zone plates, X-ray phase-contrast gratings, diamond optical components, X-ray micro/nano-resolution test targets, metalenses, and neutron gratings, with applications spanning X-ray scientific research, materials analysis, medical imaging, and other frontier directions. Leveraging its unique Ir-line doubling technology,XRnanotech it can fabricate Fresnel zone plates with resolutions as low as <10nm, and offers a variety of materials such as gold, nickel, silicon (silicon dioxide), iridium, chromium, and even diamond.

TopUnistarAs a SwissXRnanotechcompany's exclusive agent in China, we provide all pre-sales consultation, sales, and after-sales services to Chinese users. Meanwhile, as a leading service and solution provider in the EUV and X-ray field, Top Unistar has already built up a certain scale ofinventory of EUV and X-ray related equipment and core components, enabling rapid delivery to better serve our users. Additionally, we have established a well-equippedX-ray open laboratory, equipped with multiple advanced X-ray light source systems, optical components, and detectors, supporting diverse testing, pre-research, and validation work including X-ray imaging, phase-contrast imaging, diffraction analysis, fluorescence detection, and X-ray source performance characterization.

We are a team passionate about extreme ultraviolet and X-ray technology. If you have any questions you would like to discuss or explore with us, please do not hesitate to contact us directly.

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