3D 13.5 nm EUV/SXR Replicated Mirror
Czech company RITE, based on its advanced and unique replication technology, focuses on the R&D and design of "super smooth" grazing-incidence reflective optical components, offering fast custom development and high quality with globally leading process expertise. Its patented processes enable commercial production of optical components up to 300 mm in diameter, up to 250 mm in segment length, and up to 1000 mm when segments are combined. Optical components fabricated via replication technology feature low weight, high surface accuracy (low slope error), and low surface roughness. Another interesting characteristic of total-reflection mirrors is the use of various metal layers as coatings, with the most common materials being Ni, Au, Mo, and Ru.
Model: 定制
Brand: RITE
Introduction
Czech RITE, based on its advanced and unique replication technology, focuses on the R&D and design of "Super Smooth" grazing-incidence reflective optical components, with fast custom development, high quality, and a globally leading process level. Its patented process enables commercial production of optical components up to 300 mm in diameter, up to 250 mm in segment length, and up to 1000 mm when segments are combined. Optical components fabricated via replication technology feature low weight, high surface accuracy (low slope error), and low surface roughness. Another interesting property of total reflection mirrors is the use of various metal layers as coatings, with the most common materials being Ni, Au, Mo, and Ru.
- Ultra-high surface accuracy and lower surface roughness
| Average roughness Ra (nm) | Root mean square RMS (nm) | |
| 10 μm × 10 μm | 0.72 | 0.91 |
| 1 μm × 1 μm | 0.27 | 0.34 |
- Micro-roughness of Ru coating:
- Figure error accuracy
Measured with a Taylor – Hobson profilometer, the RMS (Δr) was 1.14 μm before polishing and 0.109 μm after polishing.
- Higher reflectivity
Specifications
Typical parameters of replica mirrors
• Spectral range: EUV (60 – 200 eV); soft X-ray (200 – 2000 eV); hard X-ray (2 – 10 keV)
• Mirror surface figure: ellipsoidal mirror (point-to-point focusing), parabolic mirror (parallel beam); other surface figures can also be customized upon request
• Optical surface material: Au, Ni, Ru, etc.
• R ≥50%
• Typical surface roughness: Ra ≈ 1 – 2 nm
• Typical dimensions: diameter D = 5 – 250 mm; length L = 10 – 140 mm
Imaging geometry
Examples of processed mirror elements
Focusing performance demonstration
As an extension of optical replication technology, RITE can also design and produce multi-foil optics (MFO)
Multi-Foil Optics (MFO) are well suited for applications in the soft X-ray (SXR) and EUV bands with large fields of view. They consist of two sets of mutually perpendicular ultra-thin mirrors, where photons are reflected at grazing incidence angles. Various 1D or 2D MFO shapes (e.g., lobster-eye, Kirkpatrick-Baez configurations) can be rapidly custom-developed to meet customer requirements.
MFO multi-foil optics (lobster-eye, KB mirror sets) - EUV/SXR large field of view
| Large field of view: max ±60° Substrate: glass or silicon Opening aperture: 3x3 mm - 300x300 mm Foil layer thickness: 30μm – 1 mm Surface material: Au, Ni, Mo, Pt, W, .. |  |
Examples of processed mirrors
Performance demonstration
| MFO elliptical KB system | |
|---|---|
| Energy range: 80 – 120 eV Focal length: 440 mm; Magnification: ~ 1:1 Field of view: 20° Focused spot size: ~ 0.5 – 1.0 mm External dimensions: 100 x 100 x 100 mm Aperture: 75 x 75 mm gold-coated mirror Mirror spacing: 1 to 5 mm Free space between mirrors (front view): 56% |  Focus details |
 Intensity distribution of the focused spot of extreme ultraviolet (EUV) radiation from laser-driven xenon and krypton. |  Geometry |
Lobster-eye optics | |
| • Energy range: 5 - 10 keV • Focal length: 1,000 - 1,200 mm • Magnification: ~1:1 • Field of view: 2° •Focused spot size: ~ 0.5 mm •Dimensions: 30 x 30 x 65 mm •Aperture: 18 x 18 mm• Gold-coated mirror • Mirror spacing 0.3 mm •Free space between mirrors (front view): 56% |  Focusing details (FWHM = 19 arcmin), source 80 µm, 8 keV, MEDIPIX2 detector (CTU). |
Typical Applications
- Water window, EUV microscopy
- X-ray photoelectron spectroscopy
- X-ray microscopy
- EUV lithography
Reference Users
- BESSY light source, Germany
- CYMER, USA
- Göttingen Laser Laboratory, Germany
- U.S. Naval Research Laboratory
- National Institute of Standards and Technology, USA
- University of California, USA
- NTT Japan
- LG Korea
- Netherlands Organisation for Applied Scientific Research
- University College Dublin, Ireland
About Top Unistar and RITE
In 2008, Rigaku Corporation established Rigaku Innovative Technologies Europe s.r.o. (hereinafter referred to as "RITE") in Prague, the capital of the Czech Republic. Equipped with multiple specialized X-ray laboratories, RITE serves as Rigaku's European center for the design, development, and manufacture of X-ray optical mirrors. With the rapid growth of the EUV/XUV industry and deepening research across various X-ray fields, RITE provides high-performance optical components tailored to these two major application areas. Leveraging years of expertise in X-ray and extreme ultraviolet optics, RITE not only undertakes R&D tasks for its parent company Rigaku in EUV/XUV, soft X-ray, and hard X-ray equipment, but also, adhering to an open collaboration philosophy, directly supplies standard and custom EUV/X-ray optical mirrors and high-resolution indirect X-ray detectors to industrial clients and laboratory researchers worldwide.
Top Unistar, in partnership with RITE, provides Chinese users with all pre-sales consultation, sales, and after-sales services. Meanwhile, as a leading service and solution provider in the frontier EUV-X-ray field, Top Unistar has built up a certain scale ofinventory of EUV and X-ray related equipment and core components, enabling rapid delivery capabilities to better serve our users. Additionally, we have established a well-equippedX-ray open laboratory, furnished with multiple advanced X-ray light source systems, optical components, and detectors, capable of supporting diverse testing, preliminary research, and validation work including X-ray imaging, phase-contrast imaging, diffraction analysis, fluorescence detection, and X-ray source performance characterization.
We are a team passionate about extreme ultraviolet and X-ray technology. If you have any questions you would like to discuss or explore with us, please do not hesitate to contact us directly.
| RITE Laboratory | EUV Replicated Optic |
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