Hardware ProductsDetectorScientific‑grade CCD cameraEUV / Soft X-ray In-Vacuum CCD Camera - LOTTE-s Spectral Series

EUV / Soft X-ray In-Vacuum CCD Camera - LOTTE-s Spectral Series

High quantum efficiency at 13.5 nm for EUV lithography applications

Germany

Model: LOTTE-s 系列
Brand: greateyes

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Introduction

Originating from Berlin, LOTTE is the latest development by German company greateyes, an in-vacuum camera for spectroscopy and imaging in the extreme ultraviolet, vacuum ultraviolet, and X-ray energy ranges. LOTTE integrates state-of-the-art low-noise electronics and ultra-low-temperature cooling technology while maintaining a compact and lightweight design. The new design allows flexible selection of readout speeds from 50 kHz to 5 MHz. The 18-bit analog-to-digital conversion utilizes the full dynamic range of the CCD sensor to achieve better performance and higher signal-to-noise ratio. To match the needs of different applications, the camera offers a variety of sensor types for user selection. Additionally, LOTTE's low noise makes it the ideal camera for extremely weak signal conditions, bringing unprecedented possibilities to your spectroscopy and imaging research.

Features & Advantages

1Hermetic design and UHV compatibility with quantum efficiency up to 98%
2Deep cooling to -100 °C
318-bit dynamic range
4kHz - MHz flexible readout rates with compact design

Specifications

Quantum efficiency curve

General Parameters

Readout frequency
50 kHz, 250 kHz, 1 MHz, 3 MHz (5 MHz for viewing mode; frequency customizable)
AD conversion resolution
18-bit
Linearity
Better than 99%
CCD epitaxial layer thickness
Standard 15 μm, deep depletion type 40 μm
Vacuum feedthrough flange
CF DN100 flange with D-sub connector and 6 mm water cooling inlet/outlet
Vacuum compatibility
Knife-edge sealing flange: 10-9 mbar (ultra-high vacuum)
Baking temperature
Max. +80 °C
Flange distance
6 mm (flange distance customizable)
CCD sensor cooling
100 °C to 20 °C (water cooling only)
Temperature monitoring
On the CCD sensor and the hot side of the thermoelectric cooler
Data transfer
Gigabit Ethernet (GigE)
Software
greateyes Vision software (Windows 7 / 10)
SDK and drivers
DLL for Windows; LabVIEW, EPICS, Linux, Python, and Tango drivers (optional)
TTL interface signals
1 Exposure out, 1 trigger in
Power Supply
80-264 VAC (typ. 115/230), 47-63 Hz (typ. 50/60), max. 1.1 A (230 V) / 1.9 A (115 V)
Certification
CE
Dimensions
9.0 cm (3.54ʺ) × 9.0 cm (3.54ʺ) × 23.5 cm (9.25ʺ)
Weight
5.0kg

Additional Information

Select Camera Model

Select Camera Design


Camera Standard Accessories


Optional Accessories and Software

Typical Applications

  • Extreme ultraviolet lithography

  • Soft X-ray spectroscopy

  • Plasma emission spectroscopy

  • High harmonic generation (HHG) spectroscopy

  • X-ray near-edge absorption fine structure spectroscopy

  • Resonant inelastic X-ray scattering


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