

Water-Window Soft X-ray and 6.X nm Multilayer Mirrors
The soft X-ray band, with wavelengths shorter than 13.5 nm, is a promising candidate for next-generation advanced lithography (Blue-X). In the water window (284 - 530 eV), it enables high-contrast, non-destructive nanoscale 3D imaging of hydrated biological samples such as cells. Thanks to advances in mid-infrared femtosecond laser technology, attosecond pulses of soft X-rays can be generated via HHG products to study the dynamic evolution of electrons. Whether you need collection mirrors, monochromators, or focusing mirrors for soft X-rays, we provide high-performance, customized designs to meet your requirements.
Model: 定制
Brand: optiX fab.

Introduction
Beijing Top Unistar Technology Co., Ltd. has to dateaccumulated nearly a decade of in-depth expertise in the X-ray and extreme ultraviolet (EUV) fields, along with a solid understanding of EUV optical technology development trends and the Chinese market demand. Meanwhile, optiXfab, a German company also founded in 2013, has been dedicated to commercializing the Fraunhofer Institute's patented Mo/Si multilayer technology. To date, it has produced nearly 20,000 high-performance EUV and X-ray mirrors for customers, most of whom are in the semiconductor and aerospace industries, including key optical components such as collector mirrors for LLP light sources and Schwarzschild objectives. With extensive industrialization experience and mature manufacturing processes, and based on long-term, in-depth technical exchanges and market assessments between the two parties, we have reached a deep cooperation and decided to further extend this advanced coating technology, proven in the semiconductor industry, to scientific research applications. Together, we have launched high-performance Mo/Si multilayer mirrors for the 13.5 nm wavelength band, covering standard sizes such as 1 inch and 1/2 inch. This product series can be widely applied in cutting-edge research areas including HHG light sources, laser-driven plasma light sources, EUV imaging, EUV metrology, and EUV spectroscopy. In addition, related products have established local inventory in China, enabling rapid response and delivery to provide more efficient and convenient support for users' scientific research projects.。
The soft X-ray band, with wavelengths shorter than 13.5 nm, makes it a potential candidate for the next-generation advanced lithography (Blue-X) wavelength. Meanwhile, in the "water window" band (284 - 530 eV), it enables high-contrast, non-destructive nanoscale three-dimensional imaging of hydrated biological samples (such as cells). Benefiting from the development of mid-infrared femtosecond laser technology, we can provide attosecond pulses of soft X-rays through HHG products for studying the dynamic evolution of electrons. Therefore, whether you need collector mirrors, monochromators, or focusing mirrors for soft X-rays, we can offer high-performance, flexible custom solutions to meet your experimental needs.
Features & Advantages

Specifications
Typical substrate specifications
| Parameter | Plane substrate | Spherical substrate |
|---|---|---|
| Material | fused silica | fused silica |
| Dimension | 25.4 -0.1 mm/12.7-0.1 mm | 25.4 -0.1 mm/12.7-0.1 mm |
| Thickness | 6.35 ±0.25 mm | 6.35 ±0.25 mm |
| Figure accuracy | λ/20 @ 632.8 nm PV | λ/20 @ 632.8 nm PV |
| Surface roughness | σ< 0.2 nm rms | σ< 0.2 nm rms |
| Radius of curvature | - | 500 mm (± 1 %) |
PTB-measured reflectivity of typical multilayer designs



Typical applications
Water Window soft X-ray microscope
X-ray telescope
Plasma light source analysis
XRF
XPS/ESCA, etc.
When inquiring, please provide the following information
● Central wavelength
● Reflection bandwidth (FWHM)
● Minimum required reflectivity,
● Angle of incidence
● Polarization
● Substrate material, dimensions, and shape
● Quantity

Applications

Literature
1 references found
Water-window X-ray microscopy enables 2D and 3D imaging of intact, unstained, cryo-fixed cells in a near-native state with unique contrast and high resolution. Existing synchrotron-based biological water-window microscopes are limited in accessibility and integration with complementary techniques. Laboratory light-source microscopes have struggled to achieve sufficient resolution and contrast for relevant biological tasks due to long exposure times and limited operation. This paper reports a laboratory cryo-X-ray microscopy technique with short exposure times, high contrast, and good stability, enabling routine high-resolution 3D imaging of whole cells and cell-cell interactions. By combining a stable laser-produced plasma (LPP) source with a novel optical system (soft X-ray multilayer collection mirrors manufactured by optiXfab, matched soft X-ray FZP, and CCD camera) and sample preparation methods, high-resolution cellular imaging was achieved: 2D imaging with only ten-second exposures and 3D imaging via twenty-minute tomography. Application examples include imaging carbon-rich vesicle distribution in starved HEK293T cells and imaging interactions between natural killer cells and target cells.

About Top Unistar and optiX fab
optiX fab GmbH, Germany, is a spin-off company incubated by Fraunhofer IOF and founded in 2013 to commercialize Fraunhofer IOF's research and development activities in XUV/soft and hard X-ray optics, dedicated to the design, development, and manufacturing of various multilayer mirrors.optiXfab hasprovided customized multilayer and grazing-incidence optics for the XUV/soft and hard X-ray spectral ranges to leading global manufacturers as well as research institutes, universities, and synchrotron customers. Top Unistar, in partnership with optiXfab, offers all pre-sales consultation, sales, and after-sales services to customers in China. Meanwhile, as a professional provider of EUV and X-ray core components and solutions, Top Unistar has already built up a certain inventory ofEUV and X-ray related equipment and core components, enabling rapid delivery capability to better serve our users. Additionally, we have established a well-equippedX-ray open laboratory, equipped with multiple advanced X-ray light source systems, optical components, and detectors, capable of supporting diverse testing, preliminary research, and validation work including X-ray imaging, phase-contrast imaging, diffraction analysis, fluorescence detection, and characterization of X-ray source performance.
We are a team passionate about extreme ultraviolet (EUV) and X-ray technology. If you have any questions and would like to communicate or discuss with us, do not hesitate to contact us directly.





