XUV Fresnel Zone Plate
Contrast material: SiO2 Contrast material thickness: ~250 nm Support membrane material: Si Support membrane thickness: ~200 nm Support membrane transmittance: ~70% Expected diffraction efficiency >14% @13.5 nm Typical applications: Coherent diffraction imaging Extreme ultraviolet (EUV) mask inspection EUV microscopy Angle-resolved photoemission spectroscopy
Introduction
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