13.5 nm Three-Dimensional Extreme Ultraviolet Replication Mirror
Czech company RITE, based on its advanced and unique replication technology, focuses on the R&D and design of ultra-smooth grazing-incidence reflective optical components for extreme ultraviolet (EUV) and soft X-ray (SXR) applications. It offers fast custom development with high quality and globally leading process technology.
Model: 定制
Brand: RITE
Introduction
Czech RITE, based on its advanced and unique replication technology, focuses on the R&D and design of "Super Smooth" grazing-incidence reflective optical components, offering fast customization development, high quality, and a globally leading process level. With patented processes, it can commercially produce optical components up to 300 mm in diameter, up to 250 mm in segment length, and up to 1000 mm when combined and spliced. Optical elements fabricated via replication technology feature low weight, high surface accuracy (low slope error), and low surface roughness. Another interesting property of total reflection mirrors is the use of various metal layers as coatings, with the most common materials being Ni, Au, Mo, and Ru. This type of replicated extreme ultraviolet (EUV) mirror is commonly used as collector mirrors and condensers for LPP and DPP small laboratory EUV light sources, for full-field EUV microscopy, and for other spectroscopic applications.
- Ultra-high surface accuracy and lower surface roughness
| Average roughness Ra (nm) | Root mean square RMS (nm) | |
| 10 μm × 10 μm | 0.72 | 0.91 |
| 1 μm × 1 μm | 0.27 | 0.34 |
- Micro-roughness of Ru coating:
- Figure error accuracy
Measured with a Taylor – Hobson profilometer, the RMS (Δr) was 1.14 μm before polishing and 0.109 μm after polishing.
- Higher reflectivity
Specifications
Typical parameters of replica mirrors
• Spectral range: EUV (60 – 200 eV); soft X-ray (200 – 2000 eV); hard X-ray (2 – 10 keV)
• Mirror surface figure: ellipsoidal (point-to-point focusing), parabolic (parallel beam); other figures can be customized upon request
• Optical surface materials: Au, Ni, Ru, etc.
• R ≥50%
• Typical surface roughness: Ra ≈ 1 – 2 nm
• Typical dimensions: diameter D = 5 – 250 mm; length L = 10 – 140 mm
Imaging geometry
Examples of processed lenses
Focusing performance demonstration
Literature
3 references found
Researchers used RITE's Ni-coated ellipsoidal replication mirror as the condenser of a soft X-ray full-field microscopy system. The mirror enabled the collection of capillary discharge plasma source (DPP) light (2.88 nm) and illumination of the sample. The entire system achieved a spatial resolution as low as 75 nm. For the detector, the researchers selected the XUV CCD camera from greateyes, a partner of Top Unistar.
In this study, a laser-produced plasma source was used to generate xenon (Xe) photoionized plasma. The extreme ultraviolet (EUV) radiation beam was focused by RITE's ellipsoidal focusing mirror onto a gas jet that was synchronously injected into the vacuum chamber with the EUV pulses. Photons with energies exceeding 100 eV induced inner-shell ionization of Xe atoms. The creation of N-shell vacancies led to N-shell fluorescence emission and subsequently triggered multiple ionization processes. Time-integrated EUV spectra corresponding to excited states of Xe II–V ions were recorded. Several emission lines detected in the 39–65 nm wavelength range have not been reported previously; due to the lack of relevant information in existing public databases, these lines could not be identified. In addition to spectral measurements in the EUV band, time-resolved ultraviolet and visible spectra originating from Xe II and III ions were recorded. For lines corresponding to radiative transitions of Xe II ions, the electron temperature was calculated using the Boltzmann plot method; based on this method, electron temperatures were measured at different delay times relative to the driving EUV pulse.
Researchers used RITE's Ni-coated ellipsoidal replication mirror as the condenser of a soft X-ray full-field microscopy system. The mirror enabled the collection of laser-driven soft X-ray (LPP) light (2.88 nm) and illumination of the sample. The entire system achieved a spatial resolution as low as 60 nm. For the detector, the researchers selected the XUV CCD camera from greateyes, a partner of Top Unistar.
About Top Unistar and RITE
In 2008, Rigaku Corporation established Rigaku Innovative Technologies Europe s.r.o. (hereinafter referred to as "RITE") in Prague, the capital of the Czech Republic, equipped with multiple specialized X-ray laboratories, serving as Rigaku's European center for the design, development, and manufacture of X-ray optical mirrors. As the EUV/XUV industry develops rapidly and research in various X-ray fields deepens, RITE provides high-performance optical components specifically for these two major application categories. Leveraging its years of accumulated expertise in X-ray and extreme ultraviolet optics, in addition to undertaking R&D tasks for the parent company Rigaku in EUV/XUV, soft X-ray, and hard X-ray equipment, RITE adheres to an open and collaborative philosophy and also directly supplies standard or custom EUV/X-ray optical mirrors and high-resolution indirect X-ray detectors to industrial clients and laboratory research users worldwide.
Top Unistar, in partnership with RITE, provides all pre-sales consultation, sales, and after-sales services to users in China. Meanwhile, as a leading service and solution provider in the frontier EUV-X-ray field, Top Unistar has already built up a certain scale ofinventory of EUV and X-ray related equipment and core components, enabling rapid delivery capability to better serve our users. Additionally, we have established a well-equippedX-ray open laboratory, furnished with multiple advanced X-ray light source systems, optical components, and detectors, capable of supporting diverse testing, preliminary research, and feasibility studies including X-ray imaging, phase-contrast imaging, diffraction analysis, fluorescence detection, and X-ray source performance characterization.
We are a team passionate about extreme ultraviolet and X-ray technology. If you have any questions you would like to discuss with us, do not hesitate to contact us directly.
| RITE Laboratory | EUV Replicated Optic |
 |  |
