CCD Camera for EUV/SXR/X-RAY

GE-VAC 1024 Series VUV,EUV,X-ray CCD cameras

About usGreateyes was founded in year 2007 as a spin-off from Humboldt-University Berlin and then quickly developed to an international acting company. Today it has strong customers in research a

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About us

Greateyes was founded in year 2008 as a spin-off from Humboldt-University Berlin and then quickly developed to an international acting company. Today it has strong customers in research and industry from many different countries.

Greateyes develops, manufactures and markets high-performance scientific cameras. They are used as precise detectors in a wide range of imaging and spectroscopy applications. Furthermore the company manufactures electroluminescence and photoluminescence inspection systems for the solar industry.


Based on a unique platform concept, greateyes offers a portfolio of scientific in-vacuum cameras for imaging and spectroscopy in the VUV, EUV, soft- and hard X-ray range. They are fabricated in stainless steel or aluminium providing excellent vacuum compatibility. A single additional flange integrates electrical and water cooling feedthroughs. Incoming photons are directly detected by the CCD sensor.

All greateyes cameras combine scientific CCD sensors with ultra low noise electronics for optimal detection of weak signals. Select among different spectral sensitivities and sensor tcehnologies to find the best solution for your imaging or spectroscopic application. The full frame in-vacuum CCD cameras are cooled by multi stage peltier elements. The cameras provide a rich set of functionalities including flexible binning operation, various triggerand synchronisation modes, software switchable gain as well as temperature monitoring of the CCD sensor and the heat dissipation system.

Key features


Common specifications

Typical Applications

  • EUV Lithography

  • X-Ray Tomography

  • Fourier Transform Holography

  • X-Ray Fluoroscopy

  • Coherent Diffraction Imaging

  • Ptychographic Spectromicroscopy

  • Grazing-Incidence Small-Angle X-Ray Scattering

  • Soft X-Ray Spectroscopy

  • Plasma Emission Spectroscopy

  • High Harmonic Generation Spectroscopy

  • NEXAFS Spectroscopy

  • Resonant Inelastic X-Ray Scattering

greateyes Vision software

The greateyes Vision software suite provides access to all camera functionalities. It includes comprehensive visualization, analysis and storage options and supports important features such as wavelength and geometric calibration, crop and burst modes and various file formats. The software runs on 32/64-bit Windows systems. For integration into other systems, a software development kit and drivers are available.

  • Supports crop and burst readout modes for higher frame rates and precise time resolution

  • Supports flexible horizontal and vertical binning

  • Wavelength and geometric calibration

  • Various file formats: JPG, BMP, TXT, TIFF (16-bit), DAT raw data

  • Many drivers available for integration into other systems

  • Language support in English and German

  • Comprehensive visualization and image manipulation routines

  • Runs on 32/64-bit Windows systems


北京众星联恒科技有限公司GE_VAC_1024系列_datasheet 2021-5-11.pdf